Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Overview

Fingerprint

???publication_fingerprints_help???

Material Science

Silicon Material Science

Resonator Material Science

Microelectromechani... Material Science

Single Crystal Material Science

Materials Property Material Science

Anisotropic Materia... Material Science

Engineering

Resonator Engineering

Orientation Depende... Engineering

Q Factor Engineering

Temperature Coeffic... Engineering

Microelectromechani... Engineering

Nonlinearity Engineering

Silicon Single Crys... Engineering

Engineering Engineering

Nonlinear Response Engineering

Anisotropic Engineering

Temperature Stabili... Engineering

Research OutputsResearch Output authored by Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators is tagged with the concept

Find experts having the same concept