Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

Haoshen Zhu; Joshua E.-Y. Lee

doi:10.1109/FCS.2014.6859981

Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

Haoshen Zhu
, Joshua E.-Y. Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

12 Citations (Scopus)

Abstract

This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lamé modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). © 2014 IEEE.

Original language	English
Title of host publication	IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781479949168
DOIs	https://doi.org/10.1109/FCS.2014.6859981
Publication status	Published - 2014
Event	2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, China Duration: 19 May 2014 → 22 May 2014

Conference

Conference	2014 IEEE International Frequency Control Symposium, IFCS 2014
Place	Taiwan, China
City	Taipei
Period	19/05/14 → 22/05/14

Research Keywords

lateral shear mode
MEMS resonator
nonlinearity
temperature coefficient of frequency

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10.1109/FCS.2014.6859981

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@inproceedings{e2fe96908de24c55a2f414a7a3a57e6c,

title = "Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators",

abstract = "This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lam{\'e} modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). {\textcopyright} 2014 IEEE.",

keywords = "lateral shear mode, MEMS resonator, nonlinearity, temperature coefficient of frequency",

author = "Haoshen Zhu and Lee, \{Joshua E.-Y.\}",

year = "2014",

doi = "10.1109/FCS.2014.6859981",

language = "English",

isbn = "9781479949168",

booktitle = "IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings",

publisher = "IEEE Computer Society",

address = "United States",

note = "2014 IEEE International Frequency Control Symposium, IFCS 2014 ; Conference date: 19-05-2014 Through 22-05-2014",

}

Zhu, H & Lee, JE-Y 2014, Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators. in IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings., 6859981, IEEE Computer Society, 2014 IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, China, 19/05/14. https://doi.org/10.1109/FCS.2014.6859981

Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE Computer Society, 2014. 6859981.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

AU - Zhu, Haoshen

AU - Lee, Joshua E.-Y.

PY - 2014

Y1 - 2014

N2 - This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lamé modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). © 2014 IEEE.

AB - This paper reports the first results that correlate nonlinear Duffing behavior and the temperature coefficient of frequency (TCf) in single-crystal-silicon (SCS) micromechanical resonators vibrating in lateral shear-dominant bulk modes, i.e. face shear (FS) and Lamé modes. Based on the anisotropic material property of SCS, we have derived a model to capture the nonlinear responses and the TCf for these devices in different orientations. The model predicts a clear orientation dependence of nonlinearity and temperature stability in SCS microresonators. These results suggest the possibility of reducing both nonlinearity and TCf by engineering the material properties (e.g. doping). © 2014 IEEE.

KW - lateral shear mode

KW - MEMS resonator

KW - nonlinearity

KW - temperature coefficient of frequency

UR - https://www.scopus.com/pages/publications/84906860723

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84906860723&origin=recordpage

U2 - 10.1109/FCS.2014.6859981

DO - 10.1109/FCS.2014.6859981

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781479949168

BT - IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

PB - IEEE Computer Society

T2 - 2014 IEEE International Frequency Control Symposium, IFCS 2014

Y2 - 19 May 2014 through 22 May 2014

ER -

Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

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