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Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications

  • Nien Hua Lu*
  • , Yu Min Chang
  • , Din Ping Tsai
  • *Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

We describe the optimum design of the near-field scanning optical microscope (NSOM) based on a short probe tapping mode tuning-fork (TMTF) configuration and its applications in optoelectronic characterization and optical measurements. The short probe TMTF-NSOM is constructed to operate both in collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as the light collector/emitter as well as the force sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged by collection mode. On the other hand, excitation mode of short probe TMTF-NSOM is applied to perform near-field surface photovoltage measurements on AlGaInP light emitting diode structures.
Original languageEnglish
Title of host publicationNano- and Micro-Metrology
EditorsHeidi Ottevaere, Peter DeWolf, Diederik S. Wiersma
PublisherSPIE
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventOptical Metrology 2005 - Munich, Germany
Duration: 13 Jun 200517 Jun 2005

Publication series

NameProceedings of SPIE
Volume5858
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Metrology 2005
PlaceGermany
CityMunich
Period13/06/0517/06/05

Research Keywords

  • Evanescent field
  • Near-field scanning optical microscope
  • Short probe
  • Surface photovoltage
  • Tapping-mode
  • Total internal reflection
  • Tuning fork

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