Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

Tayyab Shahid; Umer Izhar; Abid Ali; Talha Shahid; Taha Janjua

doi:10.1109/ICRAI.2016.7791242

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

Tayyab Shahid^*, Umer Izhar, Abid Ali, Talha Shahid, Taha Janjua

^*Corresponding author for this work

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

Original language	English
Title of host publication	2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016
Publisher	IEEE
Pages	136-140
ISBN (Print)	9781509040599
DOIs	https://doi.org/10.1109/ICRAI.2016.7791242
Publication status	Published - 19 Dec 2016
Event	2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016 - Islamabad, Pakistan Duration: 1 Nov 2016 → 2 Nov 2016 http://www.icrai.com

Publication series

Name	International Conference on Robotics and Artificial Intelligence
Publisher	IEEE
ISSN (Print)	2374-0175

Conference

Conference	2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016
Place	Pakistan
City	Islamabad
Period	1/11/16 → 2/11/16
Internet address	http://www.icrai.com

Research Keywords

Finite Element Analysis
MEMS
Optimal Sensor
Stress Concentration region

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Shahid, T., Izhar, U., Ali, A., Shahid, T., & Janjua, T. (2016). Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. In 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016 (pp. 136-140). Article 7791242 (International Conference on Robotics and Artificial Intelligence). IEEE. https://doi.org/10.1109/ICRAI.2016.7791242

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title = "Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor",

abstract = "This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.",

keywords = "Finite Element Analysis, MEMS, Optimal Sensor, Stress Concentration region",

author = "Tayyab Shahid and Umer Izhar and Abid Ali and Talha Shahid and Taha Janjua",

year = "2016",

month = dec,

day = "19",

doi = "10.1109/ICRAI.2016.7791242",

language = "English",

isbn = "9781509040599",

series = "International Conference on Robotics and Artificial Intelligence",

publisher = "IEEE",

pages = "136--140",

booktitle = "2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016",

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note = "2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016 ; Conference date: 01-11-2016 Through 02-11-2016",

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Shahid, T, Izhar, U, Ali, A, Shahid, T & Janjua, T 2016, Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. in 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016., 7791242, International Conference on Robotics and Artificial Intelligence, IEEE, pp. 136-140, 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016, Islamabad, Pakistan, 1/11/16. https://doi.org/10.1109/ICRAI.2016.7791242

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor. / Shahid, Tayyab; Izhar, Umer; Ali, Abid et al.
2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016. IEEE, 2016. p. 136-140 7791242 (International Conference on Robotics and Artificial Intelligence).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

AU - Shahid, Tayyab

AU - Izhar, Umer

AU - Ali, Abid

AU - Shahid, Talha

AU - Janjua, Taha

PY - 2016/12/19

Y1 - 2016/12/19

N2 - This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

AB - This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezo resistive sensor. This work describes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beam and enhances the sensitivity of the sensor. A particular defect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

KW - Finite Element Analysis

KW - MEMS

KW - Optimal Sensor

KW - Stress Concentration region

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DO - 10.1109/ICRAI.2016.7791242

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781509040599

T3 - International Conference on Robotics and Artificial Intelligence

SP - 136

EP - 140

BT - 2016 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016

PB - IEEE

T2 - 2nd International Conference on Robotics and Artificial Intelligence, ICRAI 2016

Y2 - 1 November 2016 through 2 November 2016

ER -

Optimization of SCR for sensitivity enhancement of cantilever based piezoresistive sensor

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