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Optical rib waveguide based on epitaxial Ba0.7Sr0.3TiO3 thin film grown on MgO

  • D. Y. Wang
  • , K. P. Lor
  • , K. K. Chung
  • , H. P. Chan
  • , K. S. Chiang
  • , H. L W Chan
  • , C. L. Choy

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

Barium strontium titanate (Ba0.7Sr0.3TiO3, abbreviated as BST) thin films were grown on MgO (001) single crystal substrates using pulsed laser deposition. A heteroepitaxial growth relationship of BST // MgO was confirmed by X-ray diffraction. The bidimensional structure of a rib waveguide was designed using the effective index method. A BST/MgO rib waveguide was fabricated using photolithography and reactive ion etching techniques. A single-mode near-field output pattern was observed using an end-fire coupling method at a wavelength of 1550 nm, which is consistent with our numerical calculation. © 2006 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)329-333
JournalThin Solid Films
Volume510
Issue number1-2
DOIs
Publication statusPublished - 3 Jul 2006

Research Keywords

  • Barium strontium titanate
  • Laser properties
  • Pulsed laser deposition
  • Waveguides

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