Abstract
Barium strontium titanate (Ba0.7Sr0.3TiO3, abbreviated as BST) thin films were grown on MgO (001) single crystal substrates using pulsed laser deposition. A heteroepitaxial growth relationship of BST // MgO was confirmed by X-ray diffraction. The bidimensional structure of a rib waveguide was designed using the effective index method. A BST/MgO rib waveguide was fabricated using photolithography and reactive ion etching techniques. A single-mode near-field output pattern was observed using an end-fire coupling method at a wavelength of 1550 nm, which is consistent with our numerical calculation. © 2006 Elsevier B.V. All rights reserved.
| Original language | English |
|---|---|
| Pages (from-to) | 329-333 |
| Journal | Thin Solid Films |
| Volume | 510 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 3 Jul 2006 |
Research Keywords
- Barium strontium titanate
- Laser properties
- Pulsed laser deposition
- Waveguides
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