Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing

X. M. He; K. C. Walter; M. Nastasi; S. T. Lee; X. S. Sun

doi:10.1016/S0040-6090(99)00652-5

Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing

X. M. He
, K. C. Walter
, M. Nastasi
, S. T. Lee
, X. S. Sun

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

21 Citations (Scopus)

Abstract

Hard diamond-like carbon (DLC) films have been prepared on PMMA (polymethyl methacrylate), glass, and Si(100) substrates using C₂H₂-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp³ bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass an PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed.
© 1999 Elsevier Science S.A.

Original language	English
Pages (from-to)	167-173
Journal	Thin Solid Films
Volume	355
DOIs	https://doi.org/10.1016/S0040-6090(99)00652-5
Publication status	Published - 1 Nov 1999
Event	Proceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films - San Diego, CA, USA Duration: 12 Apr 1999 → 15 Apr 1999

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Funding

We sincerely thank D.Q. Li and J.F. Bardeau for their technical support in experiments. The U.S. Department of Energy, Office of Basic Energy Science supported this work.

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title = "Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing",

abstract = "Hard diamond-like carbon (DLC) films have been prepared on PMMA (polymethyl methacrylate), glass, and Si(100) substrates using C2H2-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp3 bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass an PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed. {\textcopyright} 1999 Elsevier Science S.A.",

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AU - He, X. M.

AU - Walter, K. C.

AU - Nastasi, M.

AU - Lee, S. T.

AU - Sun, X. S.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 1999/11/1

Y1 - 1999/11/1

N2 - Hard diamond-like carbon (DLC) films have been prepared on PMMA (polymethyl methacrylate), glass, and Si(100) substrates using C2H2-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp3 bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass an PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed. © 1999 Elsevier Science S.A.

AB - Hard diamond-like carbon (DLC) films have been prepared on PMMA (polymethyl methacrylate), glass, and Si(100) substrates using C2H2-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp3 bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass an PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed. © 1999 Elsevier Science S.A.

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U2 - 10.1016/S0040-6090(99)00652-5

DO - 10.1016/S0040-6090(99)00652-5

M3 - RGC 21 - Publication in refereed journal

SN - 0040-6090

VL - 355

SP - 167

EP - 173

JO - Thin Solid Films

JF - Thin Solid Films

T2 - Proceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films

Y2 - 12 April 1999 through 15 April 1999

ER -

Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing

Abstract

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