On the zero-order diffraction of phase mask

Peng-Yue Wen; Xiao-Ming Cui; Hong-Du Liu; E. Y B Pun; P. S. Chung

doi:10.1088/0256-307X/14/11/009

On the zero-order diffraction of phase mask

Peng-Yue Wen
, Xiao-Ming Cui
, Hong-Du Liu
, E. Y B Pun
, P. S. Chung

Department of Electrical Engineering

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

1 Citation (Scopus)

Abstract

The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths. © 1997 by Allerton Press, Inc.

Original language	English
Pages (from-to)	830-833
Journal	Chinese Physics Letters
Volume	14
Issue number	11
DOIs	https://doi.org/10.1088/0256-307X/14/11/009
Publication status	Published - 1997

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@article{695cedb4a6744a14ac1b499d5f29fb40,

title = "On the zero-order diffraction of phase mask",

abstract = "The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths. {\textcopyright} 1997 by Allerton Press, Inc.",

author = "Peng-Yue Wen and Xiao-Ming Cui and Hong-Du Liu and Pun, \{E. Y B\} and Chung, \{P. S.\}",

year = "1997",

doi = "10.1088/0256-307X/14/11/009",

language = "English",

volume = "14",

pages = "830--833",

journal = "Chinese Physics Letters",

issn = "0256-307X",

publisher = "IOP Publishing",

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TY - JOUR

T1 - On the zero-order diffraction of phase mask

AU - Wen, Peng-Yue

AU - Cui, Xiao-Ming

AU - Liu, Hong-Du

AU - Pun, E. Y B

AU - Chung, P. S.

PY - 1997

Y1 - 1997

N2 - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths. © 1997 by Allerton Press, Inc.

AB - The zero-arder diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths. © 1997 by Allerton Press, Inc.

UR - https://www.scopus.com/pages/publications/0031324308

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0031324308&origin=recordpage

U2 - 10.1088/0256-307X/14/11/009

DO - 10.1088/0256-307X/14/11/009

M3 - RGC 21 - Publication in refereed journal

SN - 0256-307X

VL - 14

SP - 830

EP - 833

JO - Chinese Physics Letters

JF - Chinese Physics Letters

IS - 11

ER -

On the zero-order diffraction of phase mask

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