On the amorphous and nanocrystalline Zr-Cu and Zr-Ti co-sputtered thin films

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

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Author(s)

  • C.J. Chen
  • H.S. Chou
  • Y.H. Lai
  • L.W. Chang
  • X.H. Du
  • J.P. Chu
  • T.G. Nieh

Detail(s)

Original languageEnglish
Pages (from-to)337-340
Journal / PublicationJournal of Alloys and Compounds
Volume483
Issue number1-2
Online published12 Dec 2008
Publication statusPublished - 26 Aug 2009
Externally publishedYes

Abstract

In the current study, we examined and compared the mixing and vitrification behavior of the Zr-Cu and Zr-Ti binary systems in the form of co-sputtered thin films with or without post-annealing. The co-sputtered Zr-Cu films are all amorphous under various co-sputtering conditions, suggesting the high vitrification tendency. The amorphous Zr-Cu thin film will start to crystallize into nano-crystalline Zr2Cu and Zr7Cu10 phases upon long exposure at temperatures above 350 °C. On the other hand, it is difficult to form amorphous film with the Zr-Ti system, except at a low sputtering power of 30-50 W. The low powers enable the co-sputtered Zr-Ti thin film to exhibit the diffuse hump in the X-ray diffraction. Examination by high resolution transmission electron microscopy reveals numerous fine nano-crystalline phases around 2 nm in the amorphous matrix. Upon exposure at 700 °C, the Zr-Ti films transform into crystalline hexagonal close-packed α and body-centered cubic β phases.

Research Area(s)

  • Amorphous materials, Intermetallics, Scanning and transmission electron microscopy, Thin films

Citation Format(s)

On the amorphous and nanocrystalline Zr-Cu and Zr-Ti co-sputtered thin films. / Chen, C.J.; Huang, J.C.; Chou, H.S.; Lai, Y.H.; Chang, L.W.; Du, X.H.; Chu, J.P.; Nieh, T.G.

In: Journal of Alloys and Compounds, Vol. 483, No. 1-2, 26.08.2009, p. 337-340.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review