@inproceedings{9b5a4b661a8443d384e328344af273a5,
title = "On-chip Feedthrough Cancellation Technique for Enhanced Electrical Characterization of a Piezoelectric MEMS Resonator in Water",
abstract = "In this work, we report a unique on-chip approach of cancelling feedthrough applied to a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS resonator fully immersed in deionized (DI) water to enhance the signal-to-background ratio (SBR) in the context of full electrical characterization. We experimentally validate the proposed technique by demonstrating an SBR as high as 25dB despite a reasonably low quality factor (Q) of 162 and high dielectric constant of water from a reference SBR of 3.45dB. The proposed technique employs a pair of differential inputs where one input actuates the device while the other input cancels feedthrough and targets package-level parasitic elements associated with measuring in water. The resulting net feedthrough capacitance is reduced from 185fF to just 2.04fF in DI water. These results are based on a simple practical setup where the fabricated device is interfaced with a customized printed circuit board (PCB) by wire-bonds.",
keywords = "AlN-on-silicon, Differential inputs, Feedthrough cancellation, MEMS resonator, Quality factor",
author = "Abid Ali and Lee, {Joshua E.-Y.}",
year = "2016",
month = oct,
doi = "10.1016/j.proeng.2016.11.463",
language = "English",
isbn = "18777058",
volume = "168",
publisher = "Elsevier",
pages = "1573--1576",
booktitle = "Procedia Engineering",
note = "30th Eurosensors Conference, Eurosensors 2016 ; Conference date: 04-09-2016 Through 07-09-2016",
}