Nucleation and growth of MoSi2 pest during low temperature oxidation

T. C. Chou; T. G. Nieh

doi:10.1557/proc-288-965

Nucleation and growth of MoSi₂ pest during low temperature oxidation

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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9 Scopus Citations

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Author(s)

T. C. Chou
T. G. Nieh

Detail(s)

Original language	English
Pages (from-to)	965-970
Journal / Publication	Materials Research Society Symposium - Proceedings
Volume	288
Publication status	Published - Dec 1992
Externally published	Yes

Conference

Title	Proceedings of the 3rd Biennial Meeting of Chemical Perspectives of Microelectronic Materials
City	Boston, MA, USA
Period	30 November - 3 December 1992

Link(s)

DOI	DOI https://doi.org/10.1557/proc-288-965 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0027150028&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(70c82f90-d985-47ed-b974-720d96db2403).html

Abstract

The phenomenon of "MoSi₂ pest" has been studied in detail by low temperature oxidation of various polycrystalline MoSi₂ monoliths and composites. Single crystalline samples were studied to address the nucleation and growth of pest reaction. Pest of MoSi₂ was observed to occur at temperatures between 375 and 500 °C. Samples after pest reactions yielded to powdery reaction products of MoO₃ whiskers, SiO₂ clusters, and residual MoSi₂ particles. Although all the samples showed complete disintegration after sufficient oxidation durations were rendered, the kinetics of pest disintegration varied among different samples. By performing interrupted oxidation tests, pest reaction was found to consist of nucleation and growth stages, with the former stage acting as the rate-limiting step. Furthermore, the nucleation of pest reaction was found to be closely related to the formation of MoO₃, which was preferentially formed at such defect sites as intergranular boundaries and cracks. Mechanisms leading to the pest disintegration of MoSi₂ are discussed in light of the nucleation and growth of pest reaction.

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