Nucleation and growth of {113} defects and {111} dislocation loops in silicon-implanted silicon

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Silicon Material Science
100
Nucleation Material Science
33
Transmission Electr... Material Science
33
Surface (Surface Sc... Material Science

Engineering

100
Dislocation Loop Engineering
25
Growth Behavior Engineering
25
Separate Process Engineering
25
Plan View Engineering
Research OutputsResearch Output authored by Nucleation and growth of {113} defects and {111} dislocation loops in silicon-implanted silicon is tagged with the concept