Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Overview

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Material Science

Silicon Material Science

Resonator Material Science

Piezoelectricity Material Science

Aluminum Nitride Material Science

Film Material Science

Silicon Device Material Science

Microelectromechani... Material Science

Electromechanical C... Material Science

Engineering

Resonator Engineering

Piezoelectric Engineering

Plane Mode Engineering

Nitride Engineering

Q Factor Engineering

Mode Energy Engineering

Microelectromechani... Engineering

Electrical Output Engineering

Energy Storage Capa... Engineering

Silicon Device Engineering

Electrical Input Engineering

Vibration Mode Engineering

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