Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

Abid Ali; Joshua E.-Y. Lee

doi:10.1016/j.proeng.2015.08.833

Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

7 Citations (Scopus)

35 Downloads (CityUHK Scholars)

Abstract

In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ

Original language	English
Title of host publication	Procedia Engineering
Publisher	Elsevier
Pages	1217-1220
Volume	120
ISBN (Print)	1877-7058
DOIs	https://doi.org/10.1016/j.proeng.2015.08.833
Publication status	Published - Sept 2015
Event	29th European Conference on Solid-State Transducers, EUROSENSORS 2015 - Freiburg, Germany Duration: 6 Sept 2015 → 9 Sept 2015

Conference

Conference	29th European Conference on Solid-State Transducers, EUROSENSORS 2015
Country/Territory	Germany
City	Freiburg
Period	6/09/15 → 9/09/15

Research Keywords

Aluminum nitride
Feedthrough capacitance
Length extentional mode
MEMS resonator
Thin film piezoelectric-on-silicon

Publisher's Copyright Statement

This full text is made available under CC-BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/

Access Output

10.1016/j.proeng.2015.08.833

14355658.pdfFinal Published version, 597 KBLicence: CC BY-NC-ND

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@inproceedings{0afd6f9d7f9747d2a4ef503624d178cc,

title = "Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator",

abstract = "In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ",

keywords = "Aluminum nitride, Feedthrough capacitance, Length extentional mode, MEMS resonator, Thin film piezoelectric-on-silicon",

author = "Abid Ali and Lee, {Joshua E.-Y.}",

year = "2015",

month = sep,

doi = "10.1016/j.proeng.2015.08.833",

language = "English",

isbn = "1877-7058",

volume = "120",

pages = "1217--1220",

booktitle = "Procedia Engineering",

publisher = "Elsevier",

note = "29th European Conference on Solid-State Transducers, EUROSENSORS 2015 ; Conference date: 06-09-2015 Through 09-09-2015",

}

Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator. / Ali, Abid ; Lee, Joshua E.-Y.
Procedia Engineering. Vol. 120 Elsevier, 2015. p. 1217-1220.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

AU - Ali, Abid

AU - Lee, Joshua E.-Y.

PY - 2015/9

Y1 - 2015/9

N2 - In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ

AB - In this paper, we experimentally demonstrate full electrical characterization (i.e. both electrical input and output) of a MEMS resonator that is fully immersed in water towards realizing a novel resonant sensing platform capable of operating in liquid. Operation in liquid for resonant sensing has always been a challenge for electrical characterization. Our approach combines the strong electromechanical coupling of piezoelectric transduction provided by Aluminium Nitride (AlN), lower viscous damping by exciting an in-plane vibration mode, and higher energy storage capacity provided by the silicon device layer that is much thicker than the AlN film. Our device shows a measured quality factor (Q) of 200 when fully-immersed in water, which is over 2 times that of previously reported resonators. We are able to extract the motional resistance of the device in water, which we have found to be 40.5kΩ

KW - Aluminum nitride

KW - Feedthrough capacitance

KW - Length extentional mode

KW - MEMS resonator

KW - Thin film piezoelectric-on-silicon

U2 - 10.1016/j.proeng.2015.08.833

DO - 10.1016/j.proeng.2015.08.833

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 1877-7058

VL - 120

SP - 1217

EP - 1220

BT - Procedia Engineering

PB - Elsevier

T2 - 29th European Conference on Solid-State Transducers, EUROSENSORS 2015

Y2 - 6 September 2015 through 9 September 2015

ER -

Novel platform for resonant sensing in liquid with fully-electrical interface based on an in-plane-mode piezoelectric-on-silicon resonator

Abstract

Conference

Research Keywords

Publisher's Copyright Statement

Access Output

Other Access Options

Permanent Link

Fingerprint

Cite this