Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

Fingerprint

???publication_fingerprints_help???

Engineering & Materials Science

Research OutputsResearch Output authored by Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge is tagged with the concept