@inproceedings{850070abca3b4c2592bb40e6340cb3b6,
title = "Novel Instrumentation and Processes in Plasma Immersion Ion Implantation and Deposition",
author = "Fu, {Ricky K. Y.} and Xiubo Tian and Liuhe Li and Chu, {Paul K.}",
year = "2011",
month = jul,
day = "4",
language = "English",
pages = "37--37",
booktitle = "Proceedings 3rd International Conference on Microelectronics and Plasma Technology",
note = "3rd International Conference on Microelectronics and Plasma Technology ; Conference date: 04-07-2011 Through 07-07-2011",
}