NiTi shape memory alloy thin film micro-cantilevers array

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)5307-5309
Journal / PublicationThin Solid Films
Volume519
Issue number15
Publication statusPublished - 31 May 2011

Abstract

An un-cooled far infrared (IR) imaging sensor micro-array was fabricated using Ni-rich NiTi shape memory alloy (SMAs) films. NiTi SMA films of ∼ 5 μm thick were deposited on glass substrates by the direct current (DC) magnetron sputter deposition method. Micro-cantilever arrays were then patterned by the photolithographic technique. After crystallization aging treatments and thermo-mechanical training, the SMA films exhibit typical R-phase transition near room temperature. The thermo-mechanical sensitivity of the SMA film was found higher than that of bi-material films after the two way shape memory (TWSM) training. Illumination of the micro-arrays using IR light source had increased the temperature locally and caused curving up of the illuminated micro-cantilevers. This subsequently had led to a decrease in local reflectivity, which made digital IR imaging feasible. © 2011 Elsevier B.V. All rights reserved.

Research Area(s)

  • Infrared (IR) imaging, Nickel titanium (NiTi), Shape memory alloy, Thin film, Two-way shape memory (TWSM)

Citation Format(s)

NiTi shape memory alloy thin film micro-cantilevers array. / Chung, C. Y.; Chan, P. M.

In: Thin Solid Films, Vol. 519, No. 15, 31.05.2011, p. 5307-5309.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review