Near-field acoustic microscopy of ferroelectrics and related materials

Q. R. Yin; H. R. Zeng; G. R. Li; Z. K. Xu

doi:10.1016/S0921-5107(02)00438-5

Near-field acoustic microscopy of ferroelectrics and related materials

Q. R. Yin, H. R. Zeng, G. R. Li, Z. K. Xu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

8 Citations (Scopus)

Abstract

Ferroelectric ceramics and crystals, semiconductor on insulator material and MEMS device have been observed in scanning electron acoustic microscope. The images demonstrate the ability of the microscope to image surface texture, subsurface defect, domain structure and to penetrate opaque layers non-destructively. Ferroelectric domains viewed by scanning probe acoustic microscope based on atomic force microscope are also presented in order to compare both near-field acoustic techniques. © 2002 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	2-5
Journal	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume	99
Issue number	1-3
DOIs	https://doi.org/10.1016/S0921-5107(02)00438-5
Publication status	Published - 25 May 2003
Event	Advanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002 - Xi'an, China Duration: 10 Jun 2002 → 14 Jun 2002

Research Keywords

Electron acoustic image
Ferroelectric domain
Ferroelectric material

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title = "Near-field acoustic microscopy of ferroelectrics and related materials",

abstract = "Ferroelectric ceramics and crystals, semiconductor on insulator material and MEMS device have been observed in scanning electron acoustic microscope. The images demonstrate the ability of the microscope to image surface texture, subsurface defect, domain structure and to penetrate opaque layers non-destructively. Ferroelectric domains viewed by scanning probe acoustic microscope based on atomic force microscope are also presented in order to compare both near-field acoustic techniques. {\textcopyright} 2002 Elsevier Science B.V. All rights reserved.",

keywords = "Electron acoustic image, Ferroelectric domain, Ferroelectric material",

author = "Yin, {Q. R.} and Zeng, {H. R.} and Li, {G. R.} and Xu, {Z. K.}",

year = "2003",

month = may,

day = "25",

doi = "10.1016/S0921-5107(02)00438-5",

language = "English",

volume = "99",

pages = "2--5",

journal = "Materials Science and Engineering B: Solid-State Materials for Advanced Technology",

issn = "0921-5107",

publisher = "Elsevier Ltd.",

number = "1-3",

note = "Advanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002 ; Conference date: 10-06-2002 Through 14-06-2002",

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TY - JOUR

T1 - Near-field acoustic microscopy of ferroelectrics and related materials

AU - Yin, Q. R.

AU - Zeng, H. R.

AU - Li, G. R.

AU - Xu, Z. K.

PY - 2003/5/25

Y1 - 2003/5/25

N2 - Ferroelectric ceramics and crystals, semiconductor on insulator material and MEMS device have been observed in scanning electron acoustic microscope. The images demonstrate the ability of the microscope to image surface texture, subsurface defect, domain structure and to penetrate opaque layers non-destructively. Ferroelectric domains viewed by scanning probe acoustic microscope based on atomic force microscope are also presented in order to compare both near-field acoustic techniques. © 2002 Elsevier Science B.V. All rights reserved.

AB - Ferroelectric ceramics and crystals, semiconductor on insulator material and MEMS device have been observed in scanning electron acoustic microscope. The images demonstrate the ability of the microscope to image surface texture, subsurface defect, domain structure and to penetrate opaque layers non-destructively. Ferroelectric domains viewed by scanning probe acoustic microscope based on atomic force microscope are also presented in order to compare both near-field acoustic techniques. © 2002 Elsevier Science B.V. All rights reserved.

KW - Electron acoustic image

KW - Ferroelectric domain

KW - Ferroelectric material

UR - http://www.scopus.com/inward/record.url?scp=0038039268&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0038039268&origin=recordpage

U2 - 10.1016/S0921-5107(02)00438-5

DO - 10.1016/S0921-5107(02)00438-5

M3 - RGC 21 - Publication in refereed journal

SN - 0921-5107

VL - 99

SP - 2

EP - 5

JO - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

JF - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

IS - 1-3

T2 - Advanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002

Y2 - 10 June 2002 through 14 June 2002

ER -

Near-field acoustic microscopy of ferroelectrics and related materials

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Research Keywords

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