Nanotube devices fabricated in a nano laboratory

Lixin DONG; Fumihito ARAI; Masahiro NAKAJIMA; Pou LIU; Toshio FUKUDA

doi:10.1109/robot.2003.1242152

Nanotube devices fabricated in a nano laboratory

Lixin DONG, Fumihito ARAI, Masahiro NAKAJIMA, Pou LIU, Toshio FUKUDA

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

8 Citations (Scopus)

Abstract

A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory.

Original language	English
Title of host publication	Proceedings of the 2003 IEEE International Conference on Robotics & Automation
Publisher	IEEE
Pages	3624-3629
ISBN (Print)	0-7803-7736-2
DOIs	https://doi.org/10.1109/robot.2003.1242152
Publication status	Published - Sept 2003
Externally published	Yes
Event	2003 IEEE International Conference on Robotics and Automation - The Grand Hotel, Taipei, Taiwan Duration: 14 Sept 2003 → 19 Sept 2003

Publication series

Name	Proceedings - IEEE International Conference on Robotics and Automation
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISSN (Print)	1050-4729

Conference

Conference	2003 IEEE International Conference on Robotics and Automation
Country/Territory	Taiwan
City	Taipei
Period	14/09/03 → 19/09/03

Research Keywords

Carbon nanotubes
Electron-beam-induced deposition
Nano laboratory
Nanodevices
Nanorobotic manipulations

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/robot.2003.1242152

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title = "Nanotube devices fabricated in a nano laboratory",

abstract = "A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory.",

keywords = "Carbon nanotubes, Electron-beam-induced deposition, Nano laboratory, Nanodevices, Nanorobotic manipulations",

author = "Lixin DONG and Fumihito ARAI and Masahiro NAKAJIMA and Pou LIU and Toshio FUKUDA",

year = "2003",

month = sep,

doi = "10.1109/robot.2003.1242152",

language = "English",

isbn = "0-7803-7736-2",

series = "Proceedings - IEEE International Conference on Robotics and Automation",

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pages = "3624--3629",

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note = "2003 IEEE International Conference on Robotics and Automation ; Conference date: 14-09-2003 Through 19-09-2003",

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DONG, L, ARAI, F, NAKAJIMA, M, LIU, P & FUKUDA , T 2003, Nanotube devices fabricated in a nano laboratory. in Proceedings of the 2003 IEEE International Conference on Robotics & Automation. Proceedings - IEEE International Conference on Robotics and Automation, IEEE, pp. 3624-3629, 2003 IEEE International Conference on Robotics and Automation, Taipei, Taiwan, 14/09/03. https://doi.org/10.1109/robot.2003.1242152

Nanotube devices fabricated in a nano laboratory. / DONG, Lixin; ARAI, Fumihito; NAKAJIMA, Masahiro et al.
Proceedings of the 2003 IEEE International Conference on Robotics & Automation. IEEE, 2003. p. 3624-3629 (Proceedings - IEEE International Conference on Robotics and Automation).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Nanotube devices fabricated in a nano laboratory

AU - DONG, Lixin

AU - ARAI, Fumihito

AU - NAKAJIMA, Masahiro

AU - LIU, Pou

AU - FUKUDA , Toshio

PY - 2003/9

Y1 - 2003/9

N2 - A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory.

AB - A nano laboratory-a prototype nano manufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nano laboratory.

KW - Carbon nanotubes

KW - Electron-beam-induced deposition

KW - Nano laboratory

KW - Nanodevices

KW - Nanorobotic manipulations

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SN - 0-7803-7736-2

T3 - Proceedings - IEEE International Conference on Robotics and Automation

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BT - Proceedings of the 2003 IEEE International Conference on Robotics & Automation

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ER -

Nanotube devices fabricated in a nano laboratory

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Research Keywords

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