TY - JOUR
T1 - Nanorobotics for creating NEMS from 3D helical nanostructures
AU - Dong, Lixin
AU - Zhang, Li
AU - Bell, Dominik J
AU - Grützmacher, Detlev
AU - Nelson, Bradley J
PY - 2007
Y1 - 2007
N2 - Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from 3D SiGe/Si/Cr and Si/Cr nanostructures is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.
AB - Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from 3D SiGe/Si/Cr and Si/Cr nanostructures is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.
UR - http://www.scopus.com/inward/record.url?scp=34247501379&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-34247501379&origin=recordpage
U2 - 10.1088/1742-6596/61/1/052
DO - 10.1088/1742-6596/61/1/052
M3 - RGC 21 - Publication in refereed journal
SN - 1742-6588
VL - 61
SP - 257
EP - 261
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 052
ER -
