Nanorobotics for creating NEMS from 3D helical nanostructures

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Lixin Dong
  • Li Zhang
  • Dominik J Bell
  • Detlev Grützmacher
  • Bradley J Nelson

Detail(s)

Original languageEnglish
Article number052
Pages (from-to)257-261
Journal / PublicationJournal of Physics: Conference Series
Volume61
Issue number1
Publication statusPublished - 2007
Externally publishedYes

Abstract

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from 3D SiGe/Si/Cr and Si/Cr nanostructures is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

Citation Format(s)

Nanorobotics for creating NEMS from 3D helical nanostructures. / Dong, Lixin; Zhang, Li; Bell, Dominik J; Grützmacher, Detlev; Nelson, Bradley J.

In: Journal of Physics: Conference Series, Vol. 61, No. 1, 052, 2007, p. 257-261.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review