Nanomaterials Processing for Device Manufacturing

Carbon nanotubes (CNTs) are known to be a very unique material for various kinds of practical nanodevices. Due to large variations in electronic properties of CNTs and their extremely small size, a systemic approach for large-scale production of CNT-based nanodevices with consistent properties is still lacking. Manipulation and classification of CNTs is challenging and is not easily implemented by using the traditional robotic system. This chapter presents a new approach to classify and deposit nanotubes that provides an effective and reliable means to manufacture CNT-based devices. Homogeneous nanotubes can be precisely selected by using a microfluidic system and applying electrokinetic force to grade the nanotubes based on their electronic properties. Results indicated that directions of dielectrophoretic forces on different types of CNTs could be controlled by varying the frequency of the applied electric field. Repeatable and consistent experimental results of multiple CNT-based devices have been obtained by using the separation and deposition processes. Hence, the system provides a batch manipulation of CNTs for device manufacturing. As a result, this enhances the manufacturing and assembly of CNT-based nanodevices, which is important for the development of future nano-optoelectronic sensors and devices. © 2012 Elsevier Inc. All rights reserved.