TY - GEN
T1 - Nanolaboratory - A prototype nanomanufacturing system
AU - Fukuda, Toshio
AU - Arai, Fumihito
AU - Dong, Lixin
AU - Nakajima, Masahiro
PY - 2004/6
Y1 - 2004/6
N2 - A nanolaboratory - a prototype nanomanufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal Held emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nanolaboratory.
AB - A nanolaboratory - a prototype nanomanufacturing system-is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal Held emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nanolaboratory.
KW - Carbon nanotube
KW - Electron-beam-induced deposition
KW - Nanodevice
KW - Nanolaboratory
KW - Nanorobotic manipulation
UR - http://www.scopus.com/inward/record.url?scp=4444361770&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-4444361770&origin=recordpage
U2 - 10.1109/wcica.2004.1342088
DO - 10.1109/wcica.2004.1342088
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 0-7803-8273-0
T3 - Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
SP - 2698
EP - 2701
BT - WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings
PB - IEEE
T2 - WCICA 2004 - Fifth World Congress on Intelligent Control and Automation, Conference Proceedings
Y2 - 15 June 2004 through 19 June 2004
ER -
