Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

C. L. Chu; H. L. Ji; C. Guo; X. B. Sheng; Y. S. Dong; P. H. Lin; T. Hu; P. K. Chu

doi:10.1109/INEC.2010.5425083

Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

C. L. Chu^*
, H. L. Ji
, C. Guo
, X. B. Sheng
, Y. S. Dong
, P. H. Lin
, T. Hu
, P. K. Chu

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA. ©2010 IEEE.

Original language	English
Title of host publication	INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages	985-986
DOIs	https://doi.org/10.1109/INEC.2010.5425083
Publication status	Published - 2010
Event	3rd IEEE International NanoElectronics Conference (INEC 2010) - City University of Hong Kong, Hong Kong, China Duration: 3 Jan 2010 → 8 Jan 2010 http://www.cityu.edu.hk/ieeeinec/

Conference

Conference	3rd IEEE International NanoElectronics Conference (INEC 2010)
Place	China
City	Hong Kong
Period	3/01/10 → 8/01/10
Internet address	http://www.cityu.edu.hk/ieeeinec/

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10.1109/INEC.2010.5425083

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@inproceedings{761c6959c40a4a3e96b71d0a90e6dc23,

title = "Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy",

abstract = "Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA. {\textcopyright}2010 IEEE.",

author = "Chu, \{C. L.\} and Ji, \{H. L.\} and C. Guo and Sheng, \{X. B.\} and Dong, \{Y. S.\} and Lin, \{P. H.\} and T. Hu and Chu, \{P. K.\}",

year = "2010",

doi = "10.1109/INEC.2010.5425083",

language = "English",

isbn = "9781424435449",

pages = "985--986",

booktitle = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",

note = "3rd IEEE International NanoElectronics Conference (INEC 2010) ; Conference date: 03-01-2010 Through 08-01-2010",

url = "http://www.cityu.edu.hk/ieeeinec/",

}

Chu, CL, Ji, HL, Guo, C, Sheng, XB, Dong, YS, Lin, PH, Hu, T & Chu, PK 2010, Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy. in INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings., 5425083, pp. 985-986, 3rd IEEE International NanoElectronics Conference (INEC 2010), Hong Kong, China, 3/01/10. https://doi.org/10.1109/INEC.2010.5425083

Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy. / Chu, C. L.; Ji, H. L.; Guo, C. et al.
INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. 2010. p. 985-986 5425083.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

AU - Chu, C. L.

AU - Ji, H. L.

AU - Guo, C.

AU - Sheng, X. B.

AU - Dong, Y. S.

AU - Lin, P. H.

AU - Hu, T.

AU - Chu, P. K.

PY - 2010

Y1 - 2010

N2 - Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA. ©2010 IEEE.

AB - Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA. ©2010 IEEE.

UR - https://www.scopus.com/pages/publications/77951665097

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-77951665097&origin=recordpage

U2 - 10.1109/INEC.2010.5425083

DO - 10.1109/INEC.2010.5425083

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781424435449

SP - 985

EP - 986

BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

T2 - 3rd IEEE International NanoElectronics Conference (INEC 2010)

Y2 - 3 January 2010 through 8 January 2010

ER -

Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

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