Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

Jianlei Cui*, Jianwei Zhang, Theogene Barayavuga, Xuewen Wang, Xiaoqiao He*, Lijun Yang, Hui Xie, Xuesong Mei, Wenjun Wang

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.
Original languageEnglish
Pages (from-to)140-147
JournalIntegrated Ferroelectrics
Volume179
Issue number1
Online published18 Aug 2017
DOIs
Publication statusPublished - 2017
Event15th China International Nanoscience and Technology Symposium (CINSTS16) - Xi'an, China
Duration: 23 Oct 201626 Oct 2016

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

  • AFM
  • continuous laser
  • irradiation
  • Nanofabrication

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