Nanofabrication for multi states of Ge2Sb2Te5 by femto-seond laser induced forward transfer

Ming Lun Tseng; Bo Han Chen; Cheng Hung Chu; Chia Min Chang; Hai-Pang Chiang; Din Ping Tsai

Nanofabrication for multi states of Ge₂Sb₂Te₅ by femto-seond laser induced forward transfer

Ming Lun Tseng
, Bo Han Chen
, Cheng Hung Chu
, Chia Min Chang
, Hai-Pang Chiang
, Din Ping Tsai

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

The nano patterns of phase-change material Ge₂Sb₂Te₅ are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge₂Sb₂Te₅ patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage. © 2011 OSA.

Original language	English
Title of host publication	Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
Publisher	Optical Society of American (OSA)
ISBN (Print)	9781557529152
Publication status	Published - 2011
Externally published	Yes
Event	Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011 - Kauai, HI, United States Duration: 17 Jul 2011 → 20 Jul 2011

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
Place	United States
City	Kauai, HI
Period	17/07/11 → 20/07/11

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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Cite this

@inproceedings{4d593f29c73a4ef98f630ffc19e46010,

title = "Nanofabrication for multi states of Ge2Sb2Te5 by femto-seond laser induced forward transfer",

abstract = "The nano patterns of phase-change material Ge2Sb2Te5 are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge2Sb2Te5 patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage. {\textcopyright} 2011 OSA.",

author = "Tseng, \{Ming Lun\} and Chen, \{Bo Han\} and Chu, \{Cheng Hung\} and Chang, \{Chia Min\} and Hai-Pang Chiang and Tsai, \{Din Ping\}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].; Joint International Symposium on Optical Memory and Optical Data Storage, ISOM\_ODS 2011 ; Conference date: 17-07-2011 Through 20-07-2011",

year = "2011",

language = "English",

isbn = "9781557529152",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of American (OSA)",

booktitle = "Joint International Symposium on Optical Memory and Optical Data Storage, ISOM\_ODS 2011",

}

Tseng, ML, Chen, BH, Chu, CH, Chang, CM, Chiang, H-P & Tsai, DP 2011, Nanofabrication for multi states of Ge₂Sb₂Te₅ by femto-seond laser induced forward transfer. in Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011. Optics InfoBase Conference Papers, Optical Society of American (OSA), Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011, Kauai, HI, United States, 17/07/11.

Nanofabrication for multi states of Ge₂Sb₂Te₅ by femto-seond laser induced forward transfer. / Tseng, Ming Lun; Chen, Bo Han; Chu, Cheng Hung et al.
Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011. Optical Society of American (OSA), 2011. (Optics InfoBase Conference Papers).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Nanofabrication for multi states of Ge2Sb2Te5 by femto-seond laser induced forward transfer

AU - Tseng, Ming Lun

AU - Chen, Bo Han

AU - Chu, Cheng Hung

AU - Chang, Chia Min

AU - Chiang, Hai-Pang

AU - Tsai, Din Ping

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2011

Y1 - 2011

N2 - The nano patterns of phase-change material Ge2Sb2Te5 are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge2Sb2Te5 patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage. © 2011 OSA.

AB - The nano patterns of phase-change material Ge2Sb2Te5 are fabricated by the femto-second laser-induced forward transfer method. The size and the phase state of the Ge2Sb2Te5 patterns can be effectively controlled by varying the applied laser fluence and film thickness. Also, the multilevel electronic states of fabricated patterns are observed through the conductive-atomic force microscopy. This research has great potential in the area of the optical and the electrical data storage. © 2011 OSA.

UR - https://www.scopus.com/pages/publications/84912057586

UR - https://www.scopus.com/pages/publications/84912057586#tab=impact

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781557529152

T3 - Optics InfoBase Conference Papers

BT - Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011

PB - Optical Society of American (OSA)

T2 - Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011

Y2 - 17 July 2011 through 20 July 2011

ER -