NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS

Wei-Cheng Lien; Dung-Sheng Tsai; Shu- Hsien Chiu; Debbie G. Senesky; Roya Maboudian; Albert P. Pisano; Jr-Hau He

doi:10.1109/TRANSDUCERS.2011.5969795

NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS

Wei-Cheng Lien^*
, Dung-Sheng Tsai
, Shu- Hsien Chiu
, Debbie G. Senesky
, Roya Maboudian
, Albert P. Pisano
, Jr-Hau He

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

This work demonstrates a method to develop high temperature metal-semiconductor-metal photodetectors using low-temperature, ion beam assisted deposition of nanocrystalline silicon carbide (SiC) and hydrothermal synthesis of zinc oxide (ZnO) nanorod arrays. Due to incorporation of ZnO nanorod arrays, the photo-to-dark current ratio of Au/nanocrystalline SiC is increased from 4.9 to 13.3 at 25°C and from 4.85 to 7.57 at 200°C. The results, suggest that the ZnO nanorod arrays could serve as an antireflection layers to guide more light into the SiC photodetectors. These preliminary results support the integration of nanocrystalline SiC and ZnO nanorod arrays for use in high temperature photo-detection applications.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11)
Publisher	IEEE
Pages	1875-1878
ISBN (Electronic)	9781457701566
ISBN (Print)	9781457701573
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969795
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	International Conference on Solid State Sensors and Actuators (TRANSDUCERS)
Publisher	IEEE
ISSN (Print)	2159-547X
ISSN (Electronic)	2164-1641

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Place	China
City	Beijing
Period	5/06/11 → 9/06/11

Research Keywords

antireflection
high-temperature photodetector
Nanocrystalline SiC
ZnO nanorods

Access Output

10.1109/TRANSDUCERS.2011.5969795

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Cite this

Lien, W.-C., Tsai, D.-S., Chiu, S. H., Senesky, D. G., Maboudian, R., Pisano, A. P., & He, J.-H. (2011). NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11) (pp. 1875-1878). Article 5969795 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)). IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969795

Lien, Wei-Cheng ; Tsai, Dung-Sheng ; Chiu, Shu- Hsien et al. / NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11). IEEE, 2011. pp. 1875-1878 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)).

@inproceedings{ae5c2106cce44fd19c0c03ba7956f6ef,

title = "NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS",

abstract = "This work demonstrates a method to develop high temperature metal-semiconductor-metal photodetectors using low-temperature, ion beam assisted deposition of nanocrystalline silicon carbide (SiC) and hydrothermal synthesis of zinc oxide (ZnO) nanorod arrays. Due to incorporation of ZnO nanorod arrays, the photo-to-dark current ratio of Au/nanocrystalline SiC is increased from 4.9 to 13.3 at 25°C and from 4.85 to 7.57 at 200°C. The results, suggest that the ZnO nanorod arrays could serve as an antireflection layers to guide more light into the SiC photodetectors. These preliminary results support the integration of nanocrystalline SiC and ZnO nanorod arrays for use in high temperature photo-detection applications.",

keywords = "antireflection, high-temperature photodetector, Nanocrystalline SiC, ZnO nanorods",

author = "Wei-Cheng Lien and Dung-Sheng Tsai and Chiu, \{Shu- Hsien\} and Senesky, \{Debbie G.\} and Roya Maboudian and Pisano, \{Albert P.\} and Jr-Hau He",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969795",

language = "English",

isbn = "9781457701573",

series = "International Conference on Solid State Sensors and Actuators (TRANSDUCERS)",

publisher = "IEEE",

pages = "1875--1878",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11)",

address = "United States",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Lien, W-C, Tsai, D-S, Chiu, SH, Senesky, DG, Maboudian, R, Pisano, AP & He, J-H 2011, NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11)., 5969795, International Conference on Solid State Sensors and Actuators (TRANSDUCERS), IEEE, pp. 1875-1878, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969795

NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS. / Lien, Wei-Cheng; Tsai, Dung-Sheng; Chiu, Shu- Hsien et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11). IEEE, 2011. p. 1875-1878 5969795 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS

AU - Lien, Wei-Cheng

AU - Tsai, Dung-Sheng

AU - Chiu, Shu- Hsien

AU - Senesky, Debbie G.

AU - Maboudian, Roya

AU - Pisano, Albert P.

AU - He, Jr-Hau

PY - 2011/6

Y1 - 2011/6

N2 - This work demonstrates a method to develop high temperature metal-semiconductor-metal photodetectors using low-temperature, ion beam assisted deposition of nanocrystalline silicon carbide (SiC) and hydrothermal synthesis of zinc oxide (ZnO) nanorod arrays. Due to incorporation of ZnO nanorod arrays, the photo-to-dark current ratio of Au/nanocrystalline SiC is increased from 4.9 to 13.3 at 25°C and from 4.85 to 7.57 at 200°C. The results, suggest that the ZnO nanorod arrays could serve as an antireflection layers to guide more light into the SiC photodetectors. These preliminary results support the integration of nanocrystalline SiC and ZnO nanorod arrays for use in high temperature photo-detection applications.

AB - This work demonstrates a method to develop high temperature metal-semiconductor-metal photodetectors using low-temperature, ion beam assisted deposition of nanocrystalline silicon carbide (SiC) and hydrothermal synthesis of zinc oxide (ZnO) nanorod arrays. Due to incorporation of ZnO nanorod arrays, the photo-to-dark current ratio of Au/nanocrystalline SiC is increased from 4.9 to 13.3 at 25°C and from 4.85 to 7.57 at 200°C. The results, suggest that the ZnO nanorod arrays could serve as an antireflection layers to guide more light into the SiC photodetectors. These preliminary results support the integration of nanocrystalline SiC and ZnO nanorod arrays for use in high temperature photo-detection applications.

KW - antireflection

KW - high-temperature photodetector

KW - Nanocrystalline SiC

KW - ZnO nanorods

UR - https://www.scopus.com/pages/publications/80052127831

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-80052127831&origin=recordpage

U2 - 10.1109/TRANSDUCERS.2011.5969795

DO - 10.1109/TRANSDUCERS.2011.5969795

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781457701573

T3 - International Conference on Solid State Sensors and Actuators (TRANSDUCERS)

SP - 1875

EP - 1878

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11)

PB - IEEE

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Lien WC, Tsai DS, Chiu SH, Senesky DG, Maboudian R, Pisano AP et al. NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS'11). IEEE. 2011. p. 1875-1878. 5969795. (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)). doi: 10.1109/TRANSDUCERS.2011.5969795

NANOCRYSTALLINE SiC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR WITH ZnO NANOROD ARRAYS FOR HIGH-TEMPERATURE APPLICATIONS

Abstract

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Research Keywords

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