@inproceedings{4c12ced6b2ff411f8cb61713444b7fc2,
title = "Nano-scale mechanical test of MEMS structures by atomic force microscope",
abstract = "This paper focuses on nano-scale analysis of mechanical properties of polymer and carbon nanotubes (CNT) embedded MEMS devices using the probe tip of the Atomic Force Microscope (AFM). The mechanical properties of surfaces of layered materials were investigated by using nanoindentation produced with tips of an AFM. Experiment results indicated the bending characteristics of the device and could also indicate the Young's Modulus of the CNT embedded micro structure. Our objective is to determine the nano-scale mechanical properties and piezoresistivity of bulk carbon nanotubes using the local probe manipulation.",
author = "Fok, \{L. M.\} and Fung, \{Carmen K.M.\} and Liu, \{Y. H.\} and Li, \{Wen J.\}",
year = "2004",
language = "English",
volume = "5",
pages = "4587--4590",
booktitle = "Proceedings of the World Congress on Intelligent Control and Automation (WCICA)",
note = "5th World Congress on Intelligent Control and Automation, WCICA 2004, WCICA 2004 ; Conference date: 15-06-2004 Through 19-06-2004",
}