Nano encoders based on arrays of single nanotube emitters

Lixin Dong; Arunkumar Subramanian; Bradley J. Nelson

doi:10.1109/NANO.2005.1500731

Nano encoders based on arrays of single nanotube emitters

Lixin Dong
, Arunkumar Subramanian
, Bradley J. Nelson

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

3 Citations (Scopus)

Abstract

Linear encoders for nanoscale position sensing based on single multi-walled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.

Original language	English
Title of host publication	Proceedings of 2005 5th IEEE Conference on Nanotechnology
Publisher	IEEE
Pages	381-384
Volume	1
ISBN (Print)	0-7803-9199-3
DOIs	https://doi.org/10.1109/NANO.2005.1500731
Publication status	Published - Jul 2005
Externally published	Yes
Event	5th IEEE Conference on Nanotechnology, IEEE-NANO 2005 - Nagoya, Japan Duration: 11 Jul 2005 → 15 Jul 2005

Publication series

Name	2005 5th IEEE Conference on Nanotechnology
Volume	1

Conference

Conference	5th IEEE Conference on Nanotechnology, IEEE-NANO 2005
Place	Japan
City	Nagoya
Period	11/07/05 → 15/07/05

Research Keywords

Carbon nanotube array
Field emission
Nano encoder
Nanorobotic manipulator
Scanning anode

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10.1109/NANO.2005.1500731

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@inproceedings{9eadb908c4d044ffa63fb71fad21cc66,

title = "Nano encoders based on arrays of single nanotube emitters",

abstract = "Linear encoders for nanoscale position sensing based on single multi-walled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized. ",

keywords = "Carbon nanotube array, Field emission, Nano encoder, Nanorobotic manipulator, Scanning anode",

author = "Lixin Dong and Arunkumar Subramanian and Nelson, \{Bradley J.\}",

year = "2005",

month = jul,

doi = "10.1109/NANO.2005.1500731",

language = "English",

isbn = "0-7803-9199-3",

volume = "1",

series = "2005 5th IEEE Conference on Nanotechnology",

publisher = "IEEE",

pages = "381--384",

booktitle = "Proceedings of 2005 5th IEEE Conference on Nanotechnology",

address = "United States",

note = "5th IEEE Conference on Nanotechnology, IEEE-NANO 2005 ; Conference date: 11-07-2005 Through 15-07-2005",

}

Dong, L, Subramanian, A & Nelson, BJ 2005, Nano encoders based on arrays of single nanotube emitters. in Proceedings of 2005 5th IEEE Conference on Nanotechnology. vol. 1, 1500731, 2005 5th IEEE Conference on Nanotechnology, vol. 1, IEEE, pp. 381-384, 5th IEEE Conference on Nanotechnology, IEEE-NANO 2005, Nagoya, Japan, 11/07/05. https://doi.org/10.1109/NANO.2005.1500731

Nano encoders based on arrays of single nanotube emitters. / Dong, Lixin; Subramanian, Arunkumar; Nelson, Bradley J.
Proceedings of 2005 5th IEEE Conference on Nanotechnology. Vol. 1 IEEE, 2005. p. 381-384 1500731 (2005 5th IEEE Conference on Nanotechnology; Vol. 1).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Nano encoders based on arrays of single nanotube emitters

AU - Dong, Lixin

AU - Subramanian, Arunkumar

AU - Nelson, Bradley J.

PY - 2005/7

Y1 - 2005/7

N2 - Linear encoders for nanoscale position sensing based on single multi-walled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.

AB - Linear encoders for nanoscale position sensing based on single multi-walled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.

KW - Carbon nanotube array

KW - Field emission

KW - Nano encoder

KW - Nanorobotic manipulator

KW - Scanning anode

UR - https://www.scopus.com/pages/publications/33746962720

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33746962720&origin=recordpage

U2 - 10.1109/NANO.2005.1500731

DO - 10.1109/NANO.2005.1500731

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-9199-3

VL - 1

T3 - 2005 5th IEEE Conference on Nanotechnology

SP - 381

EP - 384

BT - Proceedings of 2005 5th IEEE Conference on Nanotechnology

PB - IEEE

T2 - 5th IEEE Conference on Nanotechnology, IEEE-NANO 2005

Y2 - 11 July 2005 through 15 July 2005

ER -

Nano encoders based on arrays of single nanotube emitters

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