Multiple-objective real-time scheduler for semiconductor wafer fab using colored timed object-oriented petri nets (CTOPN)

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

11 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)510-515
Journal / PublicationProceedings of the IEEE International Conference on Systems, Man and Cybernetics
Volume1
Publication statusPublished - 2003

Conference

TitleSystem Security and Assurance
PlaceUnited States
CityWashington, DC
Period5 - 8 October 2003

Abstract

This paper presents a multiple-objective real-time scheduler for semiconductor wafer fab using Colored Timed Object-oriented Petri net (CTOPN). First, a high-fidelity hierarchical CTOPN model of wafer fab is constructed, upon which a hierarchical control system is also formed. To rank WIP lots in meeting multiple scheduling objectives, a combined priority index is then developed in the fab level controller. To cope with unpredictable events occurred on the equipments, such as breakdown, real-time dispatching policies are encapsulated in the work station-level controllers, which dynamically dispatch wafer lot, and the dispatching results are fed back to fab controller through work area controllers.

Research Area(s)

  • CTOPN, Hierarchical structure, Multiple-objective scheduling, Real-time dispatching

Citation Format(s)

Multiple-objective real-time scheduler for semiconductor wafer fab using colored timed object-oriented petri nets (CTOPN). / Liu, Huiran; Jiang, Zhibin; Lee, Yen-Fei et al.
In: Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Vol. 1, 2003, p. 510-515.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review