TY - JOUR
T1 - Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
AU - Chen, Chi
AU - An, Ilsin
AU - Ferreira, G. M.
AU - Podraza, N. J.
AU - Zapien, J. A.
AU - Collins, R. W.
PY - 2004/5/1
Y1 - 2004/5/1
N2 - A multichannel ellipsometer in the dual rotating-compensator configuration has been designed and constructed for applications in real time Mueller matrix ellipsometry (approx. 2-5 eV) of anisotropic surfaces and films. The sequence of optical elements for this instrument is denoted PC1r(ω1)SC2r(ω2)A, where P, S, and A represent the polarizer, sample, and analyzer. C 1r(ω1) and C2r(ω2) represent two MgF2 biplate compensators that rotate at frequencies of ω1/2π=10 Hz and ω2/2π=6 Hz, synchronized for a ratio ω1:ω2 of 5:3. Spectra in the 16 Mueller matrix elements of a transmitting or reflecting sample can be established from the 25 non-zero Fourier coefficients of the irradiance waveform acquired in a single 0.25 s optical cycle. Initial high speed Mueller matrix measurements have been performed on weakly anisotropic samples that push the instrument to its precision/accuracy limits. These include the (110) Si surface with maximum cross-polarization ellipsometric angles of ψps∼0.1° and nanostructured thin films with maximum ψps∼1°. © 2003 Elsevier B.V. All rights reserved.
AB - A multichannel ellipsometer in the dual rotating-compensator configuration has been designed and constructed for applications in real time Mueller matrix ellipsometry (approx. 2-5 eV) of anisotropic surfaces and films. The sequence of optical elements for this instrument is denoted PC1r(ω1)SC2r(ω2)A, where P, S, and A represent the polarizer, sample, and analyzer. C 1r(ω1) and C2r(ω2) represent two MgF2 biplate compensators that rotate at frequencies of ω1/2π=10 Hz and ω2/2π=6 Hz, synchronized for a ratio ω1:ω2 of 5:3. Spectra in the 16 Mueller matrix elements of a transmitting or reflecting sample can be established from the 25 non-zero Fourier coefficients of the irradiance waveform acquired in a single 0.25 s optical cycle. Initial high speed Mueller matrix measurements have been performed on weakly anisotropic samples that push the instrument to its precision/accuracy limits. These include the (110) Si surface with maximum cross-polarization ellipsometric angles of ψps∼0.1° and nanostructured thin films with maximum ψps∼1°. © 2003 Elsevier B.V. All rights reserved.
KW - Data reduction
KW - Dual-rotating compensator ellipsometer
KW - Ellipsometer calibration
KW - Multichannel Mueller matrix ellipsometry
KW - Optical anisotropy
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U2 - 10.1016/j.tsf.2003.11.191
DO - 10.1016/j.tsf.2003.11.191
M3 - 21_Publication in refereed journal
VL - 455-456
SP - 14
EP - 23
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
T2 - The 3rd International Conference on Spectroscopic Ellipsometry
Y2 - 6 July 2003 through 11 July 2003
ER -