@article{af78e1003e524cee8ef66dfe375109a8, title = "Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle", abstract = "A multichannel ellipsometer in the dual rotating-compensator configuration has been designed and constructed for applications in real time Mueller matrix ellipsometry (approx. 2-5 eV) of anisotropic surfaces and films. The sequence of optical elements for this instrument is denoted PC1r(ω1)SC2r(ω2)A, where P, S, and A represent the polarizer, sample, and analyzer. C 1r(ω1) and C2r(ω2) represent two MgF2 biplate compensators that rotate at frequencies of ω1/2π=10 Hz and ω2/2π=6 Hz, synchronized for a ratio ω1:ω2 of 5:3. Spectra in the 16 Mueller matrix elements of a transmitting or reflecting sample can be established from the 25 non-zero Fourier coefficients of the irradiance waveform acquired in a single 0.25 s optical cycle. Initial high speed Mueller matrix measurements have been performed on weakly anisotropic samples that push the instrument to its precision/accuracy limits. These include the (110) Si surface with maximum cross-polarization ellipsometric angles of ψps∼0.1° and nanostructured thin films with maximum ψps∼1°. {\textcopyright} 2003 Elsevier B.V. All rights reserved.", keywords = "Data reduction, Dual-rotating compensator ellipsometer, Ellipsometer calibration, Multichannel Mueller matrix ellipsometry, Optical anisotropy", author = "Chi Chen and Ilsin An and Ferreira, {G. M.} and Podraza, {N. J.} and Zapien, {J. A.} and Collins, {R. W.}", year = "2004", month = may, day = "1", doi = "10.1016/j.tsf.2003.11.191", language = "English", volume = "455-456", pages = "14--23", journal = "Thin Solid Films", issn = "0040-6090", publisher = "Elsevier BV", note = "The 3rd International Conference on Spectroscopic Ellipsometry ; Conference date: 06-07-2003 Through 11-07-2003", }