Multichannel Ellipsometry

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 12 - Chapter in an edited book (Author) › peer-review

30 Citations (Scopus)

Access Output

@inbook{7cbf631f1b874ae296e16a878b155674,

title = "Multichannel Ellipsometry",

author = "Collins, \{Robert W.\} and Ilsin An and Joungchel Lee and Zapien, \{Juan A.\}",

year = "2005",

doi = "10.1016/B978-081551499-2.50009-5",

language = "English",

isbn = "9780815514992",

pages = "481--566",

booktitle = "Handbook of Ellipsometry",

publisher = "William Andrew",

}

TY - CHAP

T1 - Multichannel Ellipsometry

AU - Collins, Robert W.

AU - An, Ilsin

AU - Lee, Joungchel

AU - Zapien, Juan A.

PY - 2005

Y1 - 2005

UR - https://www.scopus.com/pages/publications/84882859433

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84882859433&origin=recordpage

U2 - 10.1016/B978-081551499-2.50009-5

DO - 10.1016/B978-081551499-2.50009-5

M3 - RGC 12 - Chapter in an edited book (Author)

SN - 9780815514992

SP - 481

EP - 566

BT - Handbook of Ellipsometry

PB - William Andrew

ER -