Motion controller for the atomic force microscopy based nanomanipulation system

Ruiguo Yang; Ning Xi; King Wai Chiu Lai; Bingtuan Gao; Hongzhi Chen; Chanmin Su; Jian Shi

doi:10.1109/IROS.2009.5353921

Motion controller for the atomic force microscopy based nanomanipulation system

Ruiguo Yang^*, Ning Xi, King Wai Chiu Lai, Bingtuan Gao, Hongzhi Chen, Chanmin Su, Jian Shi

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

6 Citations (Scopus)

Abstract

Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. © 2009 IEEE.

Original language	English
Title of host publication	2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009
Pages	1339-1344
DOIs	https://doi.org/10.1109/IROS.2009.5353921
Publication status	Published - 11 Dec 2009
Externally published	Yes
Event	2009 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2009) - St. Louis, United States Duration: 11 Oct 2009 → 15 Oct 2009

Conference

Conference	2009 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2009)
Place	United States
City	St. Louis
Period	11/10/09 → 15/10/09

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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@inproceedings{177cbfae71084874a3d232b18dfb5ffd,

title = "Motion controller for the atomic force microscopy based nanomanipulation system",

abstract = "Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. {\textcopyright} 2009 IEEE.",

author = "Ruiguo Yang and Ning Xi and Lai, {King Wai Chiu} and Bingtuan Gao and Hongzhi Chen and Chanmin Su and Jian Shi",

year = "2009",

month = dec,

day = "11",

doi = "10.1109/IROS.2009.5353921",

language = "English",

isbn = "9781424438044",

pages = "1339--1344",

booktitle = "2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009",

note = "2009 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2009) ; Conference date: 11-10-2009 Through 15-10-2009",

}

Yang, R, Xi, N, Lai, KWC, Gao, B, Chen, H, Su, C & Shi, J 2009, Motion controller for the atomic force microscopy based nanomanipulation system. in 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009., 5353921, pp. 1339-1344, 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2009), St. Louis, Missouri, United States, 11/10/09. https://doi.org/10.1109/IROS.2009.5353921

Motion controller for the atomic force microscopy based nanomanipulation system. / Yang, Ruiguo; Xi, Ning; Lai, King Wai Chiu et al.
2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009. 2009. p. 1339-1344 5353921.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Motion controller for the atomic force microscopy based nanomanipulation system

AU - Yang, Ruiguo

AU - Xi, Ning

AU - Lai, King Wai Chiu

AU - Gao, Bingtuan

AU - Chen, Hongzhi

AU - Su, Chanmin

AU - Shi, Jian

PY - 2009/12/11

Y1 - 2009/12/11

N2 - Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. © 2009 IEEE.

AB - Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. © 2009 IEEE.

UR - http://www.scopus.com/inward/record.url?scp=76249101341&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-76249101341&origin=recordpage

U2 - 10.1109/IROS.2009.5353921

DO - 10.1109/IROS.2009.5353921

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781424438044

SP - 1339

EP - 1344

BT - 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009

T2 - 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2009)

Y2 - 11 October 2009 through 15 October 2009

ER -

Motion controller for the atomic force microscopy based nanomanipulation system

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