Abstract
MOSFET is a kind of transistor in which the current control terminal consists of insulated gate stack. It is the most fundamental, common, and the smallest electronic device ever manufactured. The explosive advances in integrated circuits have been made possible by continuous down-scaling of this elemental device size. In order to pursue the scaling trend for next several generations, new technologies such as high-k gate insulator, metal source/drain, multiple gate structure including nanowire, and possibly III-V/Ge channel are being developed. © 2013 John Wiley & Sons, Ltd
| Original language | English |
|---|---|
| Title of host publication | Guide to State-of-the-Art Electron Devices |
| Editors | Joachim N. Burghartz |
| Publisher | John Wiley & Sons |
| Pages | 21-36 |
| ISBN (Electronic) | 9781118517543 |
| ISBN (Print) | 9781118347263 |
| DOIs | |
| Publication status | Published - 2013 |
Bibliographical note
Full text of this publication does not contain sufficient affiliation information. With consent from the author(s) concerned, the Research Unit(s) information for this record is based on the existing academic department affiliation of the author(s).Research Keywords
- Drain
- Electron
- Gate
- High-k
- Hole
- MOSFET
- Nanowire
- Scaling
- Source
- Substrate
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