TY - JOUR
T1 - Morphology and properties of PZT nanoparticle modified PZT thick film by alternative spinning
AU - Xiuying, Yang
AU - Junye, Cheng
AU - Quanliang, Zhao
AU - Hongmei, Liu
AU - Deqing, Zhang
AU - Maosheng, Cao
PY - 2017
Y1 - 2017
N2 - The present work focused on the study of morphology, crystalline structure and the ferroelectric properties of PZT thick film, which was modified with PZT nanoparticles and prepared by alternative spinning technique. The experimental results showed that the alternative spinning technique not only improved the film thickness, but also solved the problem on the membrane surface roughness of the thick film prepared by PZT 0–3 composite sol method. The results also confirmed that the electrical properties depended strongly on the annealing temperature and film thickness. With the increase of the annealing temperature, Pr increased and Ec changed inconspicuously. When the thickness of PZT thick film increased, Ec decreased but Pr increased. For the 4 µm-thick film, Ec and Pr were 23 kV/cm and 60 µC/cm2, respectively. These results suggest that the modified PZT thick film has a potential application on the fabrication of micro-devices because it provides good ferroelectricity, dielectricity and piezoelectricity.
AB - The present work focused on the study of morphology, crystalline structure and the ferroelectric properties of PZT thick film, which was modified with PZT nanoparticles and prepared by alternative spinning technique. The experimental results showed that the alternative spinning technique not only improved the film thickness, but also solved the problem on the membrane surface roughness of the thick film prepared by PZT 0–3 composite sol method. The results also confirmed that the electrical properties depended strongly on the annealing temperature and film thickness. With the increase of the annealing temperature, Pr increased and Ec changed inconspicuously. When the thickness of PZT thick film increased, Ec decreased but Pr increased. For the 4 µm-thick film, Ec and Pr were 23 kV/cm and 60 µC/cm2, respectively. These results suggest that the modified PZT thick film has a potential application on the fabrication of micro-devices because it provides good ferroelectricity, dielectricity and piezoelectricity.
KW - alternately spinning
KW - electrical properties
KW - PZT nanoparticle
KW - thick film
UR - http://www.scopus.com/inward/record.url?scp=85032828143&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85032828143&origin=recordpage
U2 - 10.1080/10584587.2017.1353284
DO - 10.1080/10584587.2017.1353284
M3 - RGC 21 - Publication in refereed journal
SN - 1058-4587
VL - 182
SP - 210
EP - 217
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
T2 - 15th China International Nanoscience and Technology Symposium (CINSTS16)
Y2 - 23 October 2016 through 26 October 2016
ER -