Monolayer MoS2-Based Flexible and Highly Sensitive Pressure Sensor with Wide Sensing Range

Dandan Xu, Ling Duan, Suyun Yan, Yong Wang, Ke Cao*, Weidong Wang*, Hongcheng Xu, Yuejiao Wang, Liangwei Hu, Libo Gao*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

26 Citations (Scopus)
56 Downloads (CityUHK Scholars)

Abstract

Flexible pressure sensors play an important role in flexible robotics, human-machine interaction (HMI), and human physiological information. However, most of the reported flexible pressure sensors suffer from a highly nonlinear response and a significant decrease in sensitivity at high pressures. Herein, we propose a flexible novel iontronic pressure sensor based on monolayer molybdenum disulfide (MoS2). Based on the unique structure and the excellent mechanical properties as well as the large intercalation capacitance of MoS2, the prepared sensor holds an ultra-high sensitivity (Smax = 89.75 kPa−1) and a wide sensing range (722.2 kPa). Further, the response time and relaxation time of the flexible sensor are only 3 ms, respectively, indicating that the device can respond to external pressure rapidly. In addition, it shows long-term cycling stability (over 5000 cycles with almost no degradation) at a high pressure of 138.9 kPa. Finally, it is demonstrated that the sensor can be used in physiological information monitoring and flexible robotics. It is anticipated that our prepared sensor provide a reliable approach to advance the theory and practicality of the flexible sensor electronics.
Original languageEnglish
Article number660
JournalMicromachines
Volume13
Issue number5
Online published22 Apr 2022
DOIs
Publication statusPublished - May 2022
Externally publishedYes

Funding

Funding: This research was funded by the National Natural Science Foundation of China (No.61904141), the Fundamental Research Funds for the Central Universities (JB210407, JB210409), the Key Research and Development Program of Shaanxi (Program No. 2021GY-277), Innovation Fund of Xidian University, the Young Talent fund of University Association for Science and Technology in Shaanxi, China (No. 20210508), and the funding of Natural Science Foundation of Shaanxi Province (No. 2021JQ-181). This research was funded by the National Natural Science Foundation of China (No.61904141), the Fundamental Research Funds for the Central Universities (JB210407, JB210409), the Key Research and Development Program of Shaanxi (Program No. 2021GY-277), Innovation Fund of Xidian Univer-sity, the Young Talent fund of University Association for Science and Technology in Shaanxi, China (No. 20210508), and the funding of Natural Science Foundation of Shaanxi Province (No. 2021JQ-181).

Research Keywords

  • flexible electronics
  • flexible sensor
  • iontronic pressure sensor
  • MoS2
  • wearable sensor

Publisher's Copyright Statement

  • This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/

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