Abstract
We have studied the low-temperature growth of gallium nitride arsenide (GaN)As layers on sapphire substrates by plasma-assisted molecular beam epitaxy. We have succeeded in achieving GaN1-xAsx alloys over a large composition range by growing the films much below the normal GaN growth temperatures with increasing the As2 flux as well as Ga:N flux ratio. We found that alloys with high As content x>0.1 are amorphous and those with x1-xAsx alloys follows the prediction of the band anticrossing model developed for dilute alloys. This suggests that the amorphous GaN1-xAsx alloys have short-range ordering that resembles random crystalline GaN1-xAsx alloys. © 2009 Elsevier B.V.
| Original language | English |
|---|---|
| Pages (from-to) | 3417-3422 |
| Journal | Journal of Crystal Growth |
| Volume | 311 |
| Issue number | 13 |
| DOIs | |
| Publication status | Published - 15 Jun 2009 |
| Externally published | Yes |
Research Keywords
- A3. Molecular beam epitaxy
- B1. Nitrides
- B2. Semiconducting III-V materials
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