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Molecular beam epitaxy of crystalline and amorphous GaN layers with high As content

  • S. V. Novikov
  • , C. R. Staddon
  • , A. V. Akimov
  • , R. P. Campion
  • , N. Zainal
  • , A. J. Kent
  • , C. T. Foxon
  • , C. H. Chen
  • , K. M. Yu
  • , W. Walukiewicz

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

We have studied the low-temperature growth of gallium nitride arsenide (GaN)As layers on sapphire substrates by plasma-assisted molecular beam epitaxy. We have succeeded in achieving GaN1-xAsx alloys over a large composition range by growing the films much below the normal GaN growth temperatures with increasing the As2 flux as well as Ga:N flux ratio. We found that alloys with high As content x>0.1 are amorphous and those with x1-xAsx alloys follows the prediction of the band anticrossing model developed for dilute alloys. This suggests that the amorphous GaN1-xAsx alloys have short-range ordering that resembles random crystalline GaN1-xAsx alloys. © 2009 Elsevier B.V.
Original languageEnglish
Pages (from-to)3417-3422
JournalJournal of Crystal Growth
Volume311
Issue number13
DOIs
Publication statusPublished - 15 Jun 2009
Externally publishedYes

Research Keywords

  • A3. Molecular beam epitaxy
  • B1. Nitrides
  • B2. Semiconducting III-V materials

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