Modulation Effects of Controllable Waveform configuration of Pulsed Bias on Microstructure and Properties of CrN Films by Magnetron Sputtering

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • C. Z. GONG
  • W. HU
  • W. L. SUN
  • X. B. TIAN
  • Paul CHU

Detail(s)

Original languageEnglish
Journal / PublicationSurface and Coatings Technology
Issue numberPaper 3
Publication statusPublished - 1 Jul 2013