Modification of structure and property in Zr-based thin film metallic glass via processing temperature control

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

22 Scopus Citations
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Author(s)

  • Jia-Hong Chu
  • Hsien-Wei Chen
  • Yu-Chen Chan
  • Jenq-Gong Duh
  • Jyh-Wei Lee
  • And 1 others
  • Jason Shian-Ching Jang

Detail(s)

Original languageEnglish
Pages (from-to)38-42
Journal / PublicationThin Solid Films
Volume561
Online published8 Jul 2013
Publication statusPublished - 30 Jun 2014
Externally publishedYes

Abstract

The aims of this study are to fabricate the Zr-Cu-Ni-Al thin film metallic glass (TFMG) on silicon substrates by DC magnetron sputtering with single target and to investigate the characteristics of coatings with various substrate temperatures. All the coatings exhibit similar structural and thermal properties, yet the hardness increases with processing temperature. It is demonstrated that amorphous matrix and cluster structure are slightly affected by the processing temperatures due to high cooling rate during deposition and superior glass-forming ability. Besides, atoms and clusters can acquire extra energy via heating substrate to stabilize each cluster, and the amount of free volume is reduced. Thus, the hardness increases with substrate temperature owing to the resistance to the shear band propagation. In summary, this study integrates the correlations among microstructure, thermal and mechanical properties, providing a convenient approach to tune TFMG coating performance.

Research Area(s)

  • Microstructure, Sputtering, Substrate heating, Thin film metallic glass

Citation Format(s)

Modification of structure and property in Zr-based thin film metallic glass via processing temperature control. / Chu, Jia-Hong; Chen, Hsien-Wei; Chan, Yu-Chen; Duh, Jenq-Gong; Lee, Jyh-Wei; Jang, Jason Shian-Ching.

In: Thin Solid Films, Vol. 561, 30.06.2014, p. 38-42.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal