Skip to main navigation Skip to search Skip to main content

Modeling of high-frequency characteristics for epoxy-sealed micro vacuum capacitors

  • Oi Ying Wong
  • , Wing Shan Tam
  • , Jun Liu
  • , Oi Kan Shea
  • , Shiu Hung Cheung
  • , C. W. Kok
  • , H. Wong

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

The high-frequency loss tangent of micro vacuum dielectric capacitors (VDCs) is modeled based on the experimental results using equivalent circuit approach. We found that the dielectric loss of the capacitor at high frequency mainly arises from the dielectric loss of the periphery sealant for the capacitors. Meanwhile, the resonant frequency of the VDCs also depends on that of the sealant. However, within the constraint of sealant material, the characteristics of the VDC can still be optimized by properly choosing the geometric factors. Smaller value of the width of boundary sealant layer to the capacitor side length ratio will result in a smaller value of loss tangent. © 2010 Elsevier Ltd. All rights reserved.
Original languageEnglish
Pages (from-to)627-630
JournalMicroelectronics Reliability
Volume50
Issue number5
DOIs
Publication statusPublished - May 2010

Fingerprint

Dive into the research topics of 'Modeling of high-frequency characteristics for epoxy-sealed micro vacuum capacitors'. Together they form a unique fingerprint.

Cite this