Modeling and characterization of an unsealed self-heating MEMS resonator for temperature compensation

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 8 Jul 2012
Event	6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012) - , China Duration: 8 Jul 2012 → 11 Jul 2012

Conference	6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012)
Place	China
Period	8/07/12 → 11/07/12

Other Access Options

@conference{0108ef769326487ab1c3b09701c2cea4,

title = "Modeling and characterization of an unsealed self-heating MEMS resonator for temperature compensation",

author = "SHAM, \{Lai Lok\} and Yuanjie XU and LEE, \{En-yuan Joshua\}",

year = "2012",

month = jul,

day = "8",

language = "English",

note = "6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012) ; Conference date: 08-07-2012 Through 11-07-2012",

}

Modeling and characterization of an unsealed self-heating MEMS resonator for temperature compensation. / SHAM, Lai Lok; XU, Yuanjie; LEE, En-yuan Joshua.
2012. Paper presented at 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012), China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Modeling and characterization of an unsealed self-heating MEMS resonator for temperature compensation

AU - SHAM, Lai Lok

AU - XU, Yuanjie

AU - LEE, En-yuan Joshua

PY - 2012/7/8

Y1 - 2012/7/8

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2012)

Y2 - 8 July 2012 through 11 July 2012

ER -