Model to estimate fractal dimension for ion-bombarded materials

A. Hu; A. Hassanein

doi:10.1016/j.nimb.2014.01.007

Author(s)

A. Hu
A. Hassanein

Detail(s)

Original language	English
Pages (from-to)	82-86
Journal / Publication	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	323
Publication status	Published - 15 Mar 2014
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1016/j.nimb.2014.01.007 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84894640470&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(ccdcc6e4-2045-490f-b52b-98862eb0e54e).html

Abstract

Comprehensive fractal Monte Carlo model ITMC-F (Hu and Hassanein, 2012 [1]) is developed based on the Monte Carlo ion bombardment simulation code, i.e., Ion Transport in Materials and Compounds (ITMC) code (Hassanein, 1985 [2]). The ITMC-F studies the impact of surface roughness on the angular dependence of sputtering yield. Instead of assuming material surfaces to be flat or composed of exact self-similar fractals in simulation, we developed a new method to describe the surface shapes. Random fractal surfaces which are generated by midpoint displacement algorithm and support vector machine algorithm are combined with ITMC. With this new fractal version of ITMC-F, we successfully simulated the angular dependence of sputtering yield for various ion-target combinations, with the input surface roughness exponent directly depicted from experimental data (Hu and Hassanein, 2012 [1]). The ITMC-F code showed good agreement with the experimental data. In advanced, we compare other experimental sputtering yield with the results from ITMC-F to estimate the surface roughness exponent for ion-bombarded material in this research. © 2014 Elsevier B.V. All rights reserved.

Research Area(s)

Angular sputtering, ITMC code, Random fractal, Roughness exponent

Citation Format(s)

[ RIS ] [ BibTeX ]

Model to estimate fractal dimension for ion-bombarded materials. / Hu, A.; Hassanein, A.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 323, 15.03.2014, p. 82-86.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Hu, A & Hassanein, A 2014, 'Model to estimate fractal dimension for ion-bombarded materials', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 323, pp. 82-86. https://doi.org/10.1016/j.nimb.2014.01.007

Hu, A., & Hassanein, A. (2014). Model to estimate fractal dimension for ion-bombarded materials. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 323, 82-86. https://doi.org/10.1016/j.nimb.2014.01.007

Hu A, Hassanein A. Model to estimate fractal dimension for ion-bombarded materials. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2014 Mar 15;323:82-86. doi: 10.1016/j.nimb.2014.01.007

Hu, A. ; Hassanein, A. / Model to estimate fractal dimension for ion-bombarded materials. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2014 ; Vol. 323. pp. 82-86.