Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators

Cheng TU; Xinglong GUO; En-yuan Joshua LEE

Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators

Cheng TU
, Xinglong GUO
, En-yuan Joshua LEE

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Abstract

This paper analyzes higher order out-of-plane vibrations in a piezoelectric Gallium Nitride (GaN) MEMS resonator that utilizes the two-dimensional electron gas (2DEG) as a switchable and embedded electrode. More specifically, we show that the out-of-plane vibration mode that provides the strongest electromechanical resonance (~12MHz) has an associated stress field that allows charges generated from the orthogonal stresses (σx and σy) via the piezoelectric effect to add up constructively. Besides, we show that the 2DEG bottom electrode can be depleted to reduce the resonant peak till it is indistinguishable from the noise floor. The on-off ratio between the resonant peaks at zero gate bias vs. 2DEG depletion is 41dB and resonator has a quality factor of 3,900.

Original language	English
Title of host publication	2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Publisher	IEEE
Pages	1977-1980
ISBN (Electronic)	978-1-4799-8955-3
Publication status	Published - 21 Jun 2015
Event	18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) - Anchorage, AK, United States Duration: 21 Jun 2015 → 25 Jun 2015

Conference

Conference	18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
Place	United States
City	Anchorage, AK
Period	21/06/15 → 25/06/15

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@inproceedings{ab506bb7c0ce483c8bb56fbaf3410cda,

title = "Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators",

abstract = "This paper analyzes higher order out-of-plane vibrations in a piezoelectric Gallium Nitride (GaN) MEMS resonator that utilizes the two-dimensional electron gas (2DEG) as a switchable and embedded electrode. More specifically, we show that the out-of-plane vibration mode that provides the strongest electromechanical resonance (\textasciitilde{}12MHz) has an associated stress field that allows charges generated from the orthogonal stresses (σx and σy) via the piezoelectric effect to add up constructively. Besides, we show that the 2DEG bottom electrode can be depleted to reduce the resonant peak till it is indistinguishable from the noise floor. The on-off ratio between the resonant peaks at zero gate bias vs. 2DEG depletion is 41dB and resonator has a quality factor of 3,900.",

author = "Cheng TU and Xinglong GUO and LEE, \{En-yuan Joshua\}",

year = "2015",

month = jun,

day = "21",

language = "English",

pages = "1977--1980",

booktitle = "2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)",

publisher = "IEEE",

address = "United States",

note = "18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) ; Conference date: 21-06-2015 Through 25-06-2015",

}

TU, C, GUO, X & LEE, EJ 2015, Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators. in 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) . IEEE, pp. 1977-1980, 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Anchorage, AK, United States, 21/06/15.

Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators. / TU, Cheng; GUO, Xinglong; LEE, En-yuan Joshua.
2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) . IEEE, 2015. p. 1977-1980.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators

AU - TU, Cheng

AU - GUO, Xinglong

AU - LEE, En-yuan Joshua

PY - 2015/6/21

Y1 - 2015/6/21

N2 - This paper analyzes higher order out-of-plane vibrations in a piezoelectric Gallium Nitride (GaN) MEMS resonator that utilizes the two-dimensional electron gas (2DEG) as a switchable and embedded electrode. More specifically, we show that the out-of-plane vibration mode that provides the strongest electromechanical resonance (~12MHz) has an associated stress field that allows charges generated from the orthogonal stresses (σx and σy) via the piezoelectric effect to add up constructively. Besides, we show that the 2DEG bottom electrode can be depleted to reduce the resonant peak till it is indistinguishable from the noise floor. The on-off ratio between the resonant peaks at zero gate bias vs. 2DEG depletion is 41dB and resonator has a quality factor of 3,900.

AB - This paper analyzes higher order out-of-plane vibrations in a piezoelectric Gallium Nitride (GaN) MEMS resonator that utilizes the two-dimensional electron gas (2DEG) as a switchable and embedded electrode. More specifically, we show that the out-of-plane vibration mode that provides the strongest electromechanical resonance (~12MHz) has an associated stress field that allows charges generated from the orthogonal stresses (σx and σy) via the piezoelectric effect to add up constructively. Besides, we show that the 2DEG bottom electrode can be depleted to reduce the resonant peak till it is indistinguishable from the noise floor. The on-off ratio between the resonant peaks at zero gate bias vs. 2DEG depletion is 41dB and resonator has a quality factor of 3,900.

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 1977

EP - 1980

BT - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

PB - IEEE

T2 - 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)

Y2 - 21 June 2015 through 25 June 2015

ER -

Modal analysis of out-of-plane vibrations in switchable piezoelectric Gallium Nitride micromechanical resonators

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