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Microstructures and mechanical properties of thin films of aluminum oxide

  • T. C. Chou
  • , T. G. Nieh
  • , S. D. McAdams
  • , G. M. Pharr

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Original languageEnglish
Pages (from-to)2203-2208
JournalScripta Metallurgica et Materiala
Volume25
Issue number10
DOIs
Publication statusPublished - Oct 1991
Externally publishedYes

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