Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

22 Scopus Citations
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Author(s)

  • Chien-Ming Kao
  • Jyh-Wei Lee
  • Hsien-Wei Chen
  • Yu-Chen Chan
  • Jenq-Gong Duh
  • And 1 others
  • Shin-Pei Chen

Detail(s)

Original languageEnglish
Pages (from-to)1438-1443
Journal / PublicationSurface and Coatings Technology
Volume205
Issue number5
Online published3 Aug 2010
Publication statusPublished - 25 Nov 2010
Externally publishedYes

Abstract

The Ti0.45Al0.55N/Cr0.75Si0.25N nanoscale multilayered coatings were deposited periodically by a bipolar asymmetric pulsed DC reactive magnetron sputtering technique. The structures and bilayer period of multilayer coatings were characterized by an X-ray diffractometer. The surface and cross-sectional morphologies of thin films were examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. The surface roughness of thin films was explored by atomic force microscopy (AFM). A nanoindenter, a micro Vickers hardness tester and pin-on-disk wear tests were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. Six coatings with bilayer period ranges from 6nm to 40nm were produced in this work. It was observed that the hardness increased with increasing bilayer period and reached the maximum at 12nm and then leveled off at periods larger than 12nm. An optimal hardness, and plastic deformation resistance, as well as adequate tribological behaviors were found on the coating with a critical bilayer period of 12nm.

Research Area(s)

  • Bilayer period, Fracture toughness, Pulsed DC reactive magnetron sputtering, TiAlN/CrSiN multilayer coating

Citation Format(s)

Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods. / Kao, Chien-Ming; Lee, Jyh-Wei; Chen, Hsien-Wei; Chan, Yu-Chen; Duh, Jenq-Gong; Chen, Shin-Pei.

In: Surface and Coatings Technology, Vol. 205, No. 5, 25.11.2010, p. 1438-1443.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal