Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Yu-Chen Chan
  • Hsien-Wei Chen
  • Pen-Shen Chao
  • Jenq-Gong Duh
  • Jyh-Wei Lee

Detail(s)

Original languageEnglish
Pages (from-to)195-199
Journal / PublicationVacuum
Volume87
Online published7 Mar 2012
Publication statusPublished - Jan 2013
Externally publishedYes

Abstract

TiAlN/SiNx multilayers were fabricated by a reactive magnetron sputtering system combining r.f. and d.c. power sources. The SiNx layer thickness (lSiNx) was 0.4 and 1 nm, while the layer thickness ratios (lTiAlN/lSiNx) of TiAlN to SiNx were adjusted to be 4/0.4 and 4/1, respectively. Characterizations by XRD, TEM, SEM and nano-indentation revealed the dependence of lSiNx on the preferred orientation, crystalline behavior, microstructure and hardness. The crystalline SiNx grew epitaxially and formed the coherent interfaces with the TiAlN, exhibiting the maximum hardness of 42 GPa. However, SiNx evidently transformed from crystalline to amorphous when the lSiNx increased to 1 nm, while microstructure of films changed from columnar feature to more densified one. The corrosion resistance of coatings in 3.5 wt % NaCl aqueous solution was investigated by potentiodynamic polarization tests and electrochemical impedance spectroscopy (EIS). The denser microstructure exhibited the lower corrosion rate and higher polarization impedance. It was revealed that the amorphous SiNx altered the coherent interfaces and the superlattice structure, leading to the improved anti-corrosion performances.

Research Area(s)

  • Corrosion resistance, Hardness, Microstructure, TiAlN/SiN multilayer

Citation Format(s)

Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics. / Chan, Yu-Chen; Chen, Hsien-Wei; Chao, Pen-Shen; Duh, Jenq-Gong; Lee, Jyh-Wei.

In: Vacuum, Vol. 87, 01.2013, p. 195-199.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review