Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Hua Zhang; Nabil A. Amro; Sandeep Disawal; Robert Elghanian; Roger Shile; Joseph Fragala

doi:10.1016/j.apsusc.2006.03.045

Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Hua Zhang^*
, Nabil A. Amro
, Sandeep Disawal
, Robert Elghanian
, Roger Shile
, Joseph Fragala

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

6 Citations (Scopus)

Abstract

A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.

Original language	English
Pages (from-to)	1960-1963
Journal	Applied Surface Science
Volume	253
Issue number	4
Online published	2 May 2006
DOIs	https://doi.org/10.1016/j.apsusc.2006.03.045
Publication status	Published - 15 Dec 2006
Externally published	Yes

Research Keywords

Micro-contact printing
Wet chemical etching
Reactive ion etching
Silicon
Silicon oxide

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10.1016/j.apsusc.2006.03.045

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title = "Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching",

abstract = "A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.",

keywords = "Micro-contact printing, Wet chemical etching, Reactive ion etching, Silicon, Silicon oxide",

author = "Hua Zhang and Amro, \{Nabil A.\} and Sandeep Disawal and Robert Elghanian and Roger Shile and Joseph Fragala",

year = "2006",

month = dec,

day = "15",

doi = "10.1016/j.apsusc.2006.03.045",

language = "English",

volume = "253",

pages = "1960--1963",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

number = "4",

}

TY - JOUR

T1 - Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

AU - Zhang, Hua

AU - Amro, Nabil A.

AU - Disawal, Sandeep

AU - Elghanian, Robert

AU - Shile, Roger

AU - Fragala, Joseph

PY - 2006/12/15

Y1 - 2006/12/15

N2 - A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.

AB - A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications.

KW - Micro-contact printing

KW - Wet chemical etching

KW - Reactive ion etching

KW - Silicon

KW - Silicon oxide

UR - https://www.scopus.com/pages/publications/33751207076

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33751207076&origin=recordpage

U2 - 10.1016/j.apsusc.2006.03.045

DO - 10.1016/j.apsusc.2006.03.045

M3 - RGC 21 - Publication in refereed journal

SN - 0169-4332

VL - 253

SP - 1960

EP - 1963

JO - Applied Surface Science

JF - Applied Surface Science

IS - 4

ER -

Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Abstract

Research Keywords

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