Microstructure and tribological properties of ternary BCN thin films with different carbon contents

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

14 Scopus Citations
View graph of relations

Author(s)

  • Xiangyang Chen
  • Zenghui Wang
  • Shengli Ma
  • Vincent Ji
  • Paul K. Chu

Detail(s)

Original languageEnglish
Pages (from-to)1225-1229
Journal / PublicationDiamond and Related Materials
Volume19
Issue number10
Publication statusPublished - Oct 2010

Abstract

Boron carbon nitrogen (BCN) thin films with different carbon contents are deposited on high-speed steel substrates by reactive magnetron sputtering (RMS) and their microstructure and tribological properties are studied. The BCN films with carbon contents from 26.9 wt.% to 61.3 wt.% have an amorphous structure with variable amounts of carbon bonds (sp2C-C, sp2C-N and sp3C-N bonds). A higher carbon content enhances the film hardness but reduces the friction coefficient against GCr15 steel balls in air. BCN films with higher hardness, lower friction coefficient, and better wear resistance can be obtained by increasing the carbon content. © 2010 Elsevier B.V. All rights reserved.

Research Area(s)

  • BCN films, Hardness, Reactive magnetron sputtering (RMS), Sliding friction

Citation Format(s)

Microstructure and tribological properties of ternary BCN thin films with different carbon contents. / Chen, Xiangyang; Wang, Zenghui; Ma, Shengli et al.
In: Diamond and Related Materials, Vol. 19, No. 10, 10.2010, p. 1225-1229.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review