Microstructure and tribological properties of ternary BCN thin films with different carbon contents

Xiangyang Chen; Zenghui Wang; Shengli Ma; Vincent Ji; Paul K. Chu

doi:10.1016/j.diamond.2010.06.013

Author(s)

Xiangyang Chen
Zenghui Wang
Shengli Ma
Vincent Ji
Paul K. Chu

Detail(s)

Original language	English
Pages (from-to)	1225-1229
Journal / Publication	Diamond and Related Materials
Volume	19
Issue number	10
Publication status	Published - Oct 2010

Link(s)

DOI	DOI https://doi.org/10.1016/j.diamond.2010.06.013 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-77956057588&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(c89e7b73-6955-451a-81ed-e4ae751203ed).html

Abstract

Boron carbon nitrogen (BCN) thin films with different carbon contents are deposited on high-speed steel substrates by reactive magnetron sputtering (RMS) and their microstructure and tribological properties are studied. The BCN films with carbon contents from 26.9 wt.% to 61.3 wt.% have an amorphous structure with variable amounts of carbon bonds (sp²C-C, sp²C-N and sp³C-N bonds). A higher carbon content enhances the film hardness but reduces the friction coefficient against GCr15 steel balls in air. BCN films with higher hardness, lower friction coefficient, and better wear resistance can be obtained by increasing the carbon content. © 2010 Elsevier B.V. All rights reserved.

Research Area(s)

BCN films, Hardness, Reactive magnetron sputtering (RMS), Sliding friction

Citation Format(s)

[ RIS ] [ BibTeX ]

Microstructure and tribological properties of ternary BCN thin films with different carbon contents. / Chen, Xiangyang; Wang, Zenghui; Ma, Shengli et al.
In: Diamond and Related Materials, Vol. 19, No. 10, 10.2010, p. 1225-1229.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Chen, X, Wang, Z, Ma, S, Ji, V & Chu, PK 2010, 'Microstructure and tribological properties of ternary BCN thin films with different carbon contents', Diamond and Related Materials, vol. 19, no. 10, pp. 1225-1229. https://doi.org/10.1016/j.diamond.2010.06.013

Chen, X., Wang, Z., Ma, S., Ji, V., & Chu, P. K. (2010). Microstructure and tribological properties of ternary BCN thin films with different carbon contents. Diamond and Related Materials, 19(10), 1225-1229. https://doi.org/10.1016/j.diamond.2010.06.013

Chen X, Wang Z, Ma S, Ji V, Chu PK. Microstructure and tribological properties of ternary BCN thin films with different carbon contents. Diamond and Related Materials. 2010 Oct;19(10):1225-1229. doi: 10.1016/j.diamond.2010.06.013

Chen, Xiangyang ; Wang, Zenghui ; Ma, Shengli et al. / Microstructure and tribological properties of ternary BCN thin films with different carbon contents. In: Diamond and Related Materials. 2010 ; Vol. 19, No. 10. pp. 1225-1229.