Microstructure and Surface Morphology Studies of MoSx Thin Films Prepared by Dual Plasma Implantation / Deposition

Microstructure and Surface Morphology Studies of MoS_x Thin Films Prepared by Dual Plasma Implantation / Deposition

Ricky K. Y. Fu, Xiubo Tian, Paul K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	46
Publication status	Published - Sept 2003
Event	7th International Workshop on Plasma-Based Ion Implantation (PBII03) - San Antonio, United States Duration: 16 Sept 2003 → 19 Sept 2003

Conference	7th International Workshop on Plasma-Based Ion Implantation (PBII03)
Abbreviated title	PBII 03
Country/Territory	United States
City	San Antonio
Period	16/09/03 → 19/09/03

@conference{c430973c63f34a338406f656299a2e75,

title = "Microstructure and Surface Morphology Studies of MoSx Thin Films Prepared by Dual Plasma Implantation / Deposition",

author = "Fu, {Ricky K. Y.} and Xiubo Tian and Chu, {Paul K.}",

year = "2003",

month = sep,

language = "English",

pages = "46",

note = "7th International Workshop on Plasma-Based Ion Implantation (PBII03), PBII 03 ; Conference date: 16-09-2003 Through 19-09-2003",

}

Microstructure and Surface Morphology Studies of MoS_x Thin Films Prepared by Dual Plasma Implantation / Deposition. / Fu, Ricky K. Y.; Tian, Xiubo; Chu, Paul K.
2003. 46 Paper presented at 7th International Workshop on Plasma-Based Ion Implantation (PBII03), San Antonio, Texas, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Microstructure and Surface Morphology Studies of MoSx Thin Films Prepared by Dual Plasma Implantation / Deposition

AU - Fu, Ricky K. Y.

AU - Tian, Xiubo

AU - Chu, Paul K.

PY - 2003/9

Y1 - 2003/9

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2003/03.C29.pdf

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 46

T2 - 7th International Workshop on Plasma-Based Ion Implantation (PBII03)

Y2 - 16 September 2003 through 19 September 2003

ER -