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Micro/Nanorobots

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 12 - Chapter in an edited book (Author)peer-review

Abstract

The field of microrobotics covers the robotic manipulation of objects with dimensions in the millimeter to micron range as well as the design and fabrication of autonomous robotic agents that fall within this size range. Nanorobotics is defined in the same way only for dimensions smaller than a micron. With the ability to position and orient objects with micron- and nanometer-scale dimensions, manipulation at each of these scales is a promising way to enable the assembly of micro- and nanosystems, including micro- and nanorobots.
This chapter overviews the state of the art of both micro- and nanorobotics, outlines scaling effects, actuation, and sensing and fabrication at these scales, and focuses on micro- and nanorobotic manipulation systems and their application in microassembly, biotechnology, and the construction and characterization of micro and nanoelectromechanical systems (MEMS/NEMS). Material science, biotechnology, and micro- and nanoelectronics will also benefit from advances in these areas of robotics.
© Springer 2008
Original languageEnglish
Title of host publicationSpringer Handbook of Robotics
EditorsBruno Siciliano, Oussama Khatib
Place of PublicationBerlin, Heidelberg
PublisherSpringer 
Chapter18
Pages411-450
Number of pages40
Edition1st
ISBN (Electronic)978-3-540-30301-5
ISBN (Print)978-3-540-23957-4
DOIs
Publication statusPublished - 2008
Externally publishedYes

Publication series

NameSpringer Handbooks
ISSN (Print)2522-8692
ISSN (Electronic)2522-8706

Research Keywords

  • Assembly operation
  • Atomic force microscope
  • Atomic force microscope cantilever
  • Motion control system
  • Scan tunneling microscope

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